The typical KLA-Tencor Research Scientist salary is $119,495. Research Scientist salaries at KLA-Tencor can range from $100,545 - $150,000. This estimate is based upon 42 KLA-Tencor Research Scientist salary report(s) provided by employees or estimated based upon statistical methods. When factoring in bonuses and additional compensation, a Research Scientist at KLA-Tencor can expect to make an average total pay of $135,548 . See all Research Scientist salaries to learn how this stacks up in the market.
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